METHOD OF MANUFACTURING LENS ARRAY SUBSTRATE, LENS ARRAY SUBSTRATE, ELECTRO-OPTICAL APPARATUS, AND ELECTRONIC EQUIPMENT

摘要

In order to manufacture a lens array substrate including a multistage lens array which is formed on a translucent substrate, a first lens layer, a first translucent layer, a second lens layer, and a second translucent layer are stacked in order on a mother substrate. At the same time, a first metal layer is formed between the first lens layer and the first translucent layer, and in the removing of the first metal layer, the first metal layer is removed from a position overlapping with at least the center of a concavity in a plane view, and remains at least at an end portion of the mother substrate as a first buffer layer.

主权项

1. A method of manufacturing a lens array substrate comprising:
forming a first concavity on a one side of a mother substrate, the mother substrate is translucent; forming a first lens layer on the one side of the mother substrate, the first lens layer is translucent and has a different refractive index from that of the mother substrate; forming a first metal layer on a surface opposite to the mother substrate of the first lens layer, the first metal layer includes a metal or a metallic compound; removing the first metal layer so as to remove a portion overlapped with the center of the first concavity in a plane view, and so as to remain at an end portion of the mother substrate; forming a first translucent layer on the surface opposite to the mother substrate of the first lens layer and the first metal layer; forming a second lens layer on a surface opposite to the mother substrate of the first translucent layer; forming a convexity or a second concavity at a position overlapped with the first concavity on a surface opposite to the mother substrate of the second lens layer, the convexity protrudes to the side opposite to the mother substrate and the second concavity is recessed toward the mother substrate; forming a second translucent layer on the surface opposite to the mother substrate of the second lens layer, the second translucent layer has a different refractive index from that of the second lens layer; and cutting the mother substrate so as to acquire a lens array substrate.