METHOD FOR THE MANUFACTURE OF DOPED QUARTZ GLASS

摘要

One aspect relates to a method for the manufacture of doped quartz glass. Moreover, one aspect relates to quartz glass obtainable according to the method including providing a soot body, treating the soot body with a gas, heating an intermediate product and vitrifying an intermediate product.

主权项

1. A method for the manufacture of doped quartz glass, comprising:
a) providing a soot body, whereby the soot body has a mean density in the range of 18 to 30% relative to the relative density of quartz glass; b) treating the soot body with a gas comprising a fluorine-containing compound in a process chamber while forming a fluorinated intermediate product (A), whereby the mean density of intermediate product (A) increases by maximally 30% relative to the mean density of the soot body in step a); c) heating fluorinated intermediate product (A) to a temperature in the range of 950 to 1,150° C. while forming a fluorinated intermediate product (B), whereby the mean density of fluorinated intermediate product (B) is maximally 80% of the relative density of quartz glass; and d) vitrifying the fluorinated intermediate product (B) in a process chamber, whereby the pressure inside the process chamber is lower than the pressure outside the process chamber, while forming the doped quartz glass.