| 摘要 |
In the present invention, a control operation for correcting a wait time on the basis of the difference between a target value and measured value for control response time is repeatedly executed, said wait time being a period after a flow rate setting value has changed to a value other than zero (0) and until output of an open signal to a flow rate control valve begins. Consequently, the response time, that is, the period after the flow rate setting value has changed and until the flow rate reaches the setting value, can be set to a desired value independently of fluid type, set flow rate, temperature, pressure, individual differences of devices, and so forth. The difference between the target value and the measured value of the control response time may be multiplied by a weighting coefficient, and the control operation may be executed with respect to each of predetermined multiple flow rate ranges. |
