发明名称 レーザ加工方法およびその装置
摘要 <P>PROBLEM TO BE SOLVED: To provide a laser processing method and a laser processing device capable of irradiating laser light in a wide range. <P>SOLUTION: A nozzle 12a for injecting liquid is slenderly formed, and the liquid is linearly injected toward a workpiece 2. A first mirror 23 to allow a part of laser light L to be transmitted to the liquid injected from the nozzle and allow the remaining laser light L to reflect, and a second mirror 24 provided at a position facing the first mirror to allow the laser light L to totally reflect off the first mirror are provided. Furthermore, transmissivity of the laser light in the first mirror is set so that one end on the side where the laser light is allowed to enter is lower than the other end in the first mirror, the laser light is allowed to enter between the first mirror and the second mirror and reflect two or more times, and the laser light transmitted through the first mirror is guided to the inside of the liquid injected from the nozzle and linearly irradiated to the workpiece. <P>COPYRIGHT: (C)2013,JPO&INPIT
申请公布号 JP5845704(B2) 申请公布日期 2016.01.20
申请号 JP20110175271 申请日期 2011.08.10
申请人 澁谷工業株式会社 发明人 小関 良治;佐々木 基
分类号 H01L21/20;B23K26/064;B23K26/067;B23K26/073;B23K26/146;H01L21/268 主分类号 H01L21/20
代理机构 代理人
主权项
地址