发明名称 |
MEMS INFRARED SENSOR INCLUDING A PLASMONIC LENS |
摘要 |
<p>A method of fabricating a semiconductor device includes forming an absorber on a substrate, and supporting a cap layer over the substrate to define a cavity between the substrate and the cap layer in which the absorber is located. The method further includes forming a lens layer on the cap layer. The lens layer is spaced apart from the cavity and defines a plurality of grooves and an opening located over the absorber.</p> |
申请公布号 |
EP2972158(A1) |
申请公布日期 |
2016.01.20 |
申请号 |
EP20130814287 |
申请日期 |
2013.11.27 |
申请人 |
ROBERT BOSCH GMBH |
发明人 |
SAMARAO, ASHWIN, K.;O'BRIEN, GARY;FEYH, ANDO;PURKL, FABIAN;YAMA, GARY |
分类号 |
G01J5/04;G01J5/02;G01J5/08;G01J5/10;G01J5/20 |
主分类号 |
G01J5/04 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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