| 摘要 |
PURPOSE:To obtain the titled element having large injection quantity of electricity and a less tendency for generating of it's scattering by vacuum-depositing a vaporating source composed of tungsten oxide in an atmosphere of hydrogen gas. CONSTITUTION:The titled element comprises a pair of substrates 1 and 2 which are transparent in at least display side substrate thereof, a display electrode member 4 formed the electrochromic substance layer 4b made of tungsten oxide via the display electrode 4a on the inside of the display side of the substrate 1, and the counter electrode 6 formed on the inside surface of the counter substrate 2, and an electrolyte 10 enclosed between the both electrode members 4 and 6. The electrochromic substance layer 4b is formed by vacuum-depositing tungsten oxide as the evaporating source on the display electrode 4a in the atmosphere of hydrogen gas. The hydrogen atom coming from hydrogen gas is taken in the tungsten oxide film, thereby increasing the amount of injection quantity of electricity of the titled element. The titled element having a large amount of injection quantity of electricity and a less tendency for generating of its scattering can be obtd. by improving the vacuum-depositing method forming the tungsten oxide film.
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