摘要 |
<P>PROBLEM TO BE SOLVED: To provide a flexure substrate for suspension capable of easily guaranteeing a relative position between first wiring and second wiring even when a laminated second conductor is overlapped on a first conductor and achieving low impedance at low cost, suspension, suspension with a head, a hard disk drive, a method for manufacturing a flexure substrate, and an inspection method. <P>SOLUTION: A pair of structures for relative position measurement formed from the first conductor and the second conductor in laminated wiring is formed in a first conductor pattern forming step for forming first wiring and a portion of second wiring and in a second conductor pattern forming step for forming the second wiring, respectively, and an overlapping state of the structures formed in each forming process is optically detected. <P>COPYRIGHT: (C)2013,JPO&INPIT |