发明名称 加工装置
摘要 The present invention provides a processing device, which can adjust the light radiation condition according to processed objects. The processing device has a camera component for recording objects to-be-processed kept on a chuck workbench. The camera component includes: a camera; a semi-transparent mirror; a first strobe light source; a plurality of optical fibers; a second strobe light source which makes the light shine on the other end face of the fibers to illuminate the objects to-be-processed in a ring; a first light quantity regulator, which is arranged between the first strobe light source and the semi-transparent mirror; a second light quantity regulator, which is arranged between the second strobe light source and the other end face of the fibers, wherein both the first light quantity regulator and the second light quantity regulator have rotation plates; open parts, which are formed on the rotation plates and are used for penetrating the strobe light from the first strobe light source and the second strobe light source; and a light screen for making the light quantity of the open part change between the maximum value and the minimum value with the rotating angle corresponding to the rotating axis.
申请公布号 JP5846768(B2) 申请公布日期 2016.01.20
申请号 JP20110127007 申请日期 2011.06.07
申请人 株式会社ディスコ 发明人 田中 誠;吉田 圭吾;山田 清
分类号 H01L21/301;B23Q17/24 主分类号 H01L21/301
代理机构 代理人
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