| 摘要 |
The invention is capable of effectively and high efficiently decreasing impurity content in helium with a low-cost and compact device and without large purifying energy. The helium at least comprises hydrogen, carbon monoxide, nitrogen, and oxygen which are used as impurities. The amount of initially-contained oxygen is more than chemical calculated amount required by the reaction of all initially-contained hydrogen and carbon monoxide. The initially-contained hydrogen and carbon monoxide is reacted with the initially-contained oxygen by using catalyst. Hydrogen is added and the amount of the hydrogen is less than chemical calculated amount required by the reaction of all oxygen residing in the helium. Then, the oxygen residing in the helium is reacted with the added hydrogen by using catalyst. Then, moisture content in the helium is decreased by dehydration operation. And finally, at least carbon dioxide, the nitrogen, and the oxygen residing in the helium are adsorbed by adsorbent through a pressure-swing adsorption method. |
