Processing apparatus for processing a semiconductor ingot, carrier and method of transferring and processing a semiconductor ingot

摘要

A carrier for a semiconductor ingot is configured for top-loading and side-loading of a semiconductor ingot. The carrier includes a holder which attaches to the semiconductor ingot and can be placed at the top of a container. A side member is movable between an open position for side-loading and a closed position. A processing apparatus may move the side member of the carrier between the open and closed positions, and is configured to load and unload the semiconductor ingot from the carrier by side-loading and side-unloading.