ELECTROSTATIC LENS TRANSMISSIVE FOR EMISSIONS FROM A SAMPLE

摘要

A transmissive electrostatic lens in a charged particle beam column for detecting X-rays and light is provided. The final lens may include focusing elements (102) that are transmissive for X-rays for EDS imaging and analysis or elements that are transmissive for light for cathodoluminescent (CL) imaging and analysis. The final lens may be constructed and arranged to include elements that are transmissive for both X-rays and light for combined EDS and CL imaging and analysis. A detector (116, 118) is arranged to detect such radiation emanating from the sample and transmitted through the lens.