发明名称 |
CARBON NANOTUBE AGGREGATE AND PROCESS FOR PRODUCING THE SAME |
摘要 |
<p>A method for manufacturing a carbon nanotube assembly including the steps of: forming metallic fine particles, having a predetermined particle diameter, on a substrate; heating the metallic fine particles to a predetermined temperature of 300°C to 400°C in a reducing atmosphere to cause reduction at surfaces thereof; heating the metallic fine particles to a predetermined reaction temperature in a reactor; and introducing an organic compound vapor into the reactor to grow carbon nanotubes on the metallic fine particles in such a way that a time during which the temperature of the metallic fine particles exceeds 450°C is 600 seconds or fewer for the period of time before the growth of the carbon nanotubes is started after the heating of the metallic fine particles is started.</p> |
申请公布号 |
EP1810950(B1) |
申请公布日期 |
2016.01.20 |
申请号 |
EP20050803959 |
申请日期 |
2005.11.10 |
申请人 |
NIKON CORPORATION |
发明人 |
TAKI, YUSUKE;SHINOHARA, KIYOAKI |
分类号 |
C01B31/02;H01J1/304;H01J9/02 |
主分类号 |
C01B31/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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