发明名称 CARBON NANOTUBE AGGREGATE AND PROCESS FOR PRODUCING THE SAME
摘要 <p>A method for manufacturing a carbon nanotube assembly including the steps of: forming metallic fine particles, having a predetermined particle diameter, on a substrate; heating the metallic fine particles to a predetermined temperature of 300°C to 400°C in a reducing atmosphere to cause reduction at surfaces thereof; heating the metallic fine particles to a predetermined reaction temperature in a reactor; and introducing an organic compound vapor into the reactor to grow carbon nanotubes on the metallic fine particles in such a way that a time during which the temperature of the metallic fine particles exceeds 450°C is 600 seconds or fewer for the period of time before the growth of the carbon nanotubes is started after the heating of the metallic fine particles is started.</p>
申请公布号 EP1810950(B1) 申请公布日期 2016.01.20
申请号 EP20050803959 申请日期 2005.11.10
申请人 NIKON CORPORATION 发明人 TAKI, YUSUKE;SHINOHARA, KIYOAKI
分类号 C01B31/02;H01J1/304;H01J9/02 主分类号 C01B31/02
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