BORON-CONTAINING PRECURSORS, BORON-CONTAINING COMPOSITIONS CONTAINING THEM AND BORON-CONTAINING THIN FILM USING THE SAME

摘要

The present invention relates to a boron-containing precursor which can form a boron-containing thin film, a composition comprising the same, and the thin film using the same. The boron-containing precursor of the present invention can form a high-quality boron-containing thin film, with high thermal stability and volatility. The boron-containing precursor is represented by chemical formula 1.