| 发明名称 |
COORDINATION OF BEAM ANGLE AND WORKPIECE MOVEMENT FOR TAPER CONTROL |
| 摘要 |
The angle of incidence (ω) and azimuth (&phgr;) of a beam axis (32) can be moved relative to a workpiece (22) to provide desirable taper characteristics to a side wall (124) of a resulting kerf (120) produced by a focused laser beam (30) propagated along the beam axis (32). |
| 申请公布号 |
EP2969372(A1) |
申请公布日期 |
2016.01.20 |
| 申请号 |
EP20140767505 |
申请日期 |
2014.03.11 |
| 申请人 |
ELECTRO SCIENTIFIC INDUSTRIES, INC. |
发明人 |
ZHANG, HAIBIN |
| 分类号 |
B23K26/36;B23K26/0622;B23K26/066;B23K26/08;B23K26/082;B23K26/352;B23K26/362;B23K26/382;B23K26/384 |
主分类号 |
B23K26/36 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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