发明名称 WAFER MAPPING PROCESS CONTROL WITH INDICATOR LINE
摘要 <p>A method for providing alignment in a die picking process may include aligning a semiconductor wafer based on a reference die, forming an indicator line relative to the reference die by picking a number of dice along a line extending across the wafer, and using the reference line to monitor a position of the picking machine relative to the wafer. A die attach machine may include a control system for automatically implementing such method.</p>
申请公布号 EP2973675(A1) 申请公布日期 2016.01.20
申请号 EP20140715160 申请日期 2014.03.06
申请人 MICROCHIP TECHNOLOGY INCORPORATED 发明人 GIBSON, MATTHEW;NA-NAMCHIEW, PREM;KENGANANTANON, EKGACHAI;BUNKER, MATTHEW
分类号 H01L21/67;H01L21/68 主分类号 H01L21/67
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