| 摘要 |
A method for monitoring movement of at least one moving mirror in a MEMS device comprising one or more moving mirrors, and wherein the monitoring is based upon capacitance changes over time in the MEMS device. The method comprises the steps of if the at least one moving mirror is an in-plane mirror, then: a. providing DC voltage to the MEMS device in addition to a driving voltage required for the movement of that at least one moving mirror; b. measuring current proportional to capacitance changes associated with the movement of the at least one moving mirror; and c. monitoring the movement of the at least one moving mirror based on the measured current. |
