发明名称 |
COMPOSITION AND PROCESS FOR STRIPPING PHOTORESIST FROM A SURFACE INCLUDING TITANIUM NITRIDE |
摘要 |
A method and low pH compositions for removing bulk and/or hardened photoresist material from microelectronic devices have been developed. The low pH compositions include sulfuric acid and at least one phosphorus-containing acid. The low pH compositions effectively remove the hardened photoresist material while not damaging the underlying silicon-containing layer(s) or the metal gate materials. |
申请公布号 |
EP2850495(A4) |
申请公布日期 |
2016.01.20 |
申请号 |
EP20130791286 |
申请日期 |
2013.05.17 |
申请人 |
ENTEGRIS, INC. |
发明人 |
COOPER, EMANUEL I.;CONNER, MARC;OWENS, MICHAEL |
分类号 |
G03F7/42;B08B3/00;C11D3/04;C11D3/36;G03F7/32;H01L21/027;H01L21/311 |
主分类号 |
G03F7/42 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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