| 发明名称 |
POWDER PARTICLE COATING USING ATOMIC LAYER DEPOSITION CARTRIDGE |
| 摘要 |
<p>A method includes receiving an atomic layer deposition (ALD) cartridge into a receiver of an ALD reactor by a quick coupling method. The ALD cartridge serves as an ALD reaction chamber, and the method includes processing surfaces of particulate material within the ALD cartridge by sequential self-saturating surface reactions.</p> |
| 申请公布号 |
EP2850222(A4) |
申请公布日期 |
2016.01.20 |
| 申请号 |
EP20120877000 |
申请日期 |
2012.05.14 |
| 申请人 |
PICOSUN OY |
发明人 |
LINDFORS, SVEN;SOININEN, PEKKA J. |
| 分类号 |
C23C16/455 |
主分类号 |
C23C16/455 |
| 代理机构 |
|
代理人 |
|
| 主权项 |
|
| 地址 |
|
