发明名称 電子顕微鏡用試料ホルダ
摘要 A sample holder for an electron microscope has multiple sample stands, can allow at least one sample stand to move, and enables multiple samples for a transmission electron microscope to be prepared by a focused ion beam apparatus. A holder tip opening is provided in a tip of the sample holder. A back end of the sample holder has a knob, a rolling mechanism, a coarse adjustment mechanism, and a connector. By pressing the knob, fixation of the rolling mechanism is canceled, and the back end from the rolling mechanism and the tip of the sample holder will rotate. This rolling mechanism enables arrangement of the samples to be rotated in both the observing of a sample and the preparing of a sample for a transmission electron microscope with the focused ion beam apparatus. Moreover, the sample stand is movable by the coarse adjustment mechanism and the fine adjustment mechanism.
申请公布号 JP5846931(B2) 申请公布日期 2016.01.20
申请号 JP20120012610 申请日期 2012.01.25
申请人 株式会社日立ハイテクノロジーズ 发明人 寺田 尚平;谷口 佳史;長久保 康平
分类号 H01J37/20 主分类号 H01J37/20
代理机构 代理人
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