Microelectromechanical sensor with improved mechanical decoupling of sensing and driving modes

摘要

A driving mass of an integrated microelectromechanical structure is moved with a rotary motion about an axis of rotation, and a sensing mass is connected to the driving mass via elastic supporting elements so as to perform a detection movement in the presence of an external stress. The driving mass is anchored to a first anchorage arranged along the axis of rotation by first elastic anchorage elements. The driving mass is also coupled to a pair of further anchorages positioned externally thereof and coupled to opposite sides with respect to the first anchorage by further elastic anchorage elements; the elastic supporting elements and the first and further elastic anchorage elements render the driving mass fixed to the first sensing mass in the rotary motion, and substantially decoupled from the sensing mass in the detection movement, the detection movement being a rotation about an axis lying in a plane.

主权项

1. An integrated microelectromechanical structure, comprising:
a substrate; a driving mass designed to be moved with a rotary motion about an axis of rotation and having a central aperturerelative to a central axis; a first anchorage arrangement positioned in the central aperture and structured to anchor the driving mass to the substrate;arranged at the central axis and coupled to the substrate; a first opening provided within said driving mass; elastic anchorage elements coupling the driving mass to the first anchorage; a first sensing mass of a first type arranged inside said first opening; first elastic supporting elements connectingcoupling said first sensing mass to said driving mass and configured to enable the first sensing mass to move in a first direction in response to a first acceleration to perform a first detection movementin the presence of a first external stress; a second sensing mass that is of a type that is different from the first sensing mass; second elastic supporting elements coupled between the driving mass and the second sensing mass and configured to enable the second sensing mass to perform a second detection movement in response to a second acceleration, said first detection movement being a rotational movement about a first axis lying in a plane of said driving mass, and said second detection movement being a linear movement along a second axis lying in said plane; a second anchorage arrangement positioned externally of said driving mass and coupled to a first side of the driving mass; a third anchorage arrangement positioned externally of said driving mass and coupled to a second side of the driving mass, the second side being opposite to the first side; wherein said first elastic supporting elements and said first, second and third anchorage arrangementsanchorages are so configured so that said drivingfirst sensing mass is fixed to said first sensingdriving mass of the first type in said rotary motionand driven relative to the central axis, and the first sensing mass is decoupled therefrom in said detection movementfrom the driving mass when moving in said first direction.