Mask having separated line patterns connected by a connecting pattern

摘要

According to one embodiment, a mask includes a line-and-space mask pattern. The mask has a separation portion separating a line pattern in a predetermined region within the line-and-space mask pattern. The mask also includes a connection pattern arranged in a crossing direction crossing the extending direction of the line pattern connecting the separated line patterns. The connection pattern is arranged on a position where the end of the line pattern, which is separated by the separation portion, projects from the connection pattern.

主权项

1. A mask comprising:
a mask pattern in which line patterns and space patterns are alternately arranged in a crossing direction, the crossing direction being a direction that crosses an extending direction of the line patterns, the mask pattern forming a line-and-space pattern above an object to be processed; a separation portion that separates the line patterns in a predetermined region in the mask pattern; and a connection pattern arranged in the crossing direction, the connection pattern connecting the separated line patterns, wherein the connection pattern is arranged at a position in which ends of the line patterns that are separated by the separation portion project with respect to the connection pattern.