Controlled coating apparatus, systems, and methods

摘要

Apparatus and systems may operate to provide a first reactant as a gas that flows under reduced atmospheric pressure to interact with a surface, such as a tool body surface, the interaction confined to a passage within the tool body, wherein the passage includes the surface and extends without interruption from an entrance end of the passage to an exit end of the passage. Additional activity may include providing a second reactant as a gas under the reduced atmospheric pressure, subsequent to the first reactant, to interact with the surface of the tool body; and repeated provision of the first and second reactants until a selected coating thickness on the surface is formed. Additional apparatus, systems, and methods are disclosed.

主权项

1. A method, comprising:
providing a first quantity of a first reactant as a gas that flows under reduced atmospheric pressure to interact with a surface of a tool body by atomic layer deposition, the interaction confined to a passage within the tool body, the passage including the surface and extending without interruption from an entrance end of the passage to an exit end of the passage, the first quantity of the first reactant provided in a train of gas components; providing a second quantity of a second reactant as a gas under the reduced atmospheric pressure, subsequent to the first quantity, to interact with the surface of the tool body, the second quantity of the second reactant provided in the train of gas components; and repeating providing the first quantity and the second quantity until a selected thickness of a coating on the surface is formed.