| 发明名称 | Ceramic member, probe holder, and manufacturing method of ceramic member | ||
| 摘要 | There is provided a ceramic member which is a sintered body containing enstatite and boron nitride as constituents, in which boron nitride is oriented in a single direction, a probe holder formed using the ceramic member, and a manufacturing method of the ceramic member. In the ceramic member, an index of orientation degree is not less than 0.8. In so doing, it is possible to provide a ceramic member which has a free machining property, a coefficient of thermal expansion which is close to that of silicon, and high strength, and a probe holder which is formed using the ceramic member, and a manufacturing method of the ceramic member. | ||
| 申请公布号 | US9238593(B2) | 申请公布日期 | 2016.01.19 |
| 申请号 | US201113809290 | 申请日期 | 2011.07.13 |
| 申请人 | NHK Spring Co., Ltd. | 发明人 | Nakamura Akira;Suzuki Kohei;Miyaji Shinya;Saito Shinji |
| 分类号 | B32B3/24;C04B35/583;C04B35/20;C04B35/645;G01R1/067;G01R3/00 | 主分类号 | B32B3/24 |
| 代理机构 | Locke Lord LLP | 代理人 | Locke Lord LLP |
| 主权项 | 1. A ceramic member comprising enstatite and boron nitride as constituents, wherein the ceramic member is a sintered body in which the boron nitride is oriented in a single direction. | ||
| 地址 | Yokohama-shi JP | ||