| 发明名称 | Piezoelectric actuator, liquid ejecting head, and method of manufacturing piezoelectric actuator | ||
| 摘要 | Provided is piezoelectric actuator includes; a vibrating plate; a first electrode provided on the vibrating plate; a first seed layer provided on the first electrode; a second seed layer provided on the vibrating plate at least at a position adjacent to the first electrode; a first piezoelectric layer provided on the first seed layer, the first piezoelectric layer and has a perovskite structure; a second piezoelectric layer that is provided to cover the first piezoelectric layer and the second seed layer; and a second electrode that is provided on the second piezoelectric layer. The first piezoelectric layer and the second piezoelectric layer are preferentially oriented to a (100) face. | ||
| 申请公布号 | US9238366(B2) | 申请公布日期 | 2016.01.19 |
| 申请号 | US201514624695 | 申请日期 | 2015.02.18 |
| 申请人 | Seiko Epson Corporation | 发明人 | Kobayashi Tomokazu |
| 分类号 | B41J2/045;B41J2/14;H01L41/09;H01L41/277 | 主分类号 | B41J2/045 |
| 代理机构 | Harness, Dickey & Pierce, P.L.C. | 代理人 | Harness, Dickey & Pierce, P.L.C. |
| 主权项 | 1. A piezoelectric actuator comprising: a vibrating plate; a first electrode provided on the vibrating plate; a first seed layer provided on the first electrode; a second seed layer provided on the vibrating plate at least at a position adjacent to the first electrode; a first piezoelectric layer provided on the first seed layer, the first piezoelectric layer having a perovskite structure and preferentially oriented to a (100) face; a second piezoelectric layer provided to cover the first piezoelectric layer and the second seed layer, the second piezoelectric layer preferentially oriented to a (100) face; and a second electrode provided on the second piezoelectric layer. | ||
| 地址 | JP | ||