| 发明名称 | Supporting member separation apparatus and supporting member separation method | ||
| 摘要 | A supporting member separation apparatus that separates a supporting member from a laminate having a substrate, an adhesive layer, a release layer which has a property that changes when it absorbs light, and the supporting member which are laminated in this order. The apparatus includes a holding unit that holds one surface of the laminate, a lifting and lowering unit that lifts and lowers the holding unit, and an adjustment unit that maintains a constant applied force to the holding unit. | ||
| 申请公布号 | US9238357(B2) | 申请公布日期 | 2016.01.19 |
| 申请号 | US201414202445 | 申请日期 | 2014.03.10 |
| 申请人 | TOKYO OHKA KOGYO CO., LTD. | 发明人 | Takase Shinji;Inao Yoshihiro;Nakamura Akihiko |
| 分类号 | B32B38/10;B32B43/00;H01L21/67 | 主分类号 | B32B38/10 |
| 代理机构 | Knobbe Martens Olson & Bear LLP | 代理人 | Knobbe Martens Olson & Bear LLP |
| 主权项 | 1. A supporting member separation apparatus that separates a supporting member from a laminate having a substrate, an adhesive layer, a release layer which has a property that changes when it absorbs light, and the supporting member which are laminated in this order, the supporting member separation apparatus comprising: a holding unit that holds one surface of the laminate; a lifting and lowering unit that lifts and lowers the holding unit; an adjustment unit that maintains a constant force which is applied to the holding unit; and locking means that is in contact with the adjustment unit or a plate portion including the holding units when the holding units are to be inclined. | ||
| 地址 | Kawasaki-Shi JP | ||