Transfer position teaching method, transfer position teaching apparatus and substrate processing apparatus

摘要

The transfer position teaching apparatus is provided with a teaching substrate having a shape identical to a semiconductor wafer to be processed by substrate processing apparatuses and having an electrically conductive coating thereon. The transfer position teaching apparatus is also provided with a base member having insulator coating thereon and on the base member, entrance contact members, Y-direction contact members, X-direction contact member are vertically arranged.

主权项

1. A transfer position teaching apparatus for teaching a transfer position of a substrate comprising:
a substrate transfer member; a hand for transferring the substrate to the substrate transfer member; a teaching substrate supported by the hand in place of the substrate to be transferred to the substrate transfer member; and a detection member, placed at a position corresponding to the substrate transfer member to detect a position of an electrical contact between the teaching substrate and the detection member, wherein the substrate transfer member is a substrate-storing container for storing a plurality of substrates in a stacked condition, and wherein the detection member includes a pair of Y-direction contact members placed correspondingly to a width of an opening of the substrate-storing container and an X-direction contact member placed correspondingly to a depth of an opening of the substrate-storing container.