| 摘要 |
Provided is a substrate returning device. The substrate returning device comprises: a plurality of shafts arranged in a second direction which is perpendicular to a first direction, wherein the first direction is provided as the longitudinal direction of the substrate returning device individually; and a roller member fixedly installed to an outer peripheral surface of the returning shafts and comprising a roller and an O-ring, wherein the O-ring is fixedly installed on an outer peripheral surface of the roller and becomes in contact with the substrate, and the O-ring and the roller are coupled to each other in a convex-concave structure. |
