发明名称 MAPPING MODULE FOR ENHANCING PRECISION AND DOOR ASSEMBLY ON LOAD PORT THEREWITH
摘要 The present invention relates to a mapping module with higher precision, and a door assembly of a load port including the same. Since a mapping arm is directly combined with a power generating unit without an extra relay unit such as a gear, precision is excellent and durability is significantly improved. Since the mapping arm rotates at a preset rotation angle but includes a hooking unit, touching the mapping arm, in a position forming an allowable maximum rotation angle, an error by rotation angle is efficiently prevented. A latchkey module installed on a door plate is included, and power, generated through one power operating part, is delivered to a latchkey through a shaft without an extra relay unit, and therefore, the number of relay units to deliver the power is minimized to increase the precision of control. The latchkey module controls a rotatable range of the latchkey and a movable range of the shaft according to the length of a support rod insertion hole, and therefore, the rotation of the latchkey is precisely controlled.
申请公布号 KR101586718(B1) 申请公布日期 2016.01.19
申请号 KR20140150205 申请日期 2014.10.31
申请人 METIS CO., LTD. 发明人 YOUN, DEA SIK;SIN, CHUNG YEUP
分类号 H01L21/673;B65D85/38;H01L21/68 主分类号 H01L21/673
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