发明名称 APPARATUS AND METHOD FOR TREATING
摘要 The present invention relates to an apparatus for a treatment process. According to an embodiment of the present invention, the apparatus for a treatment process comprises a loader unit, a dumping unit, a treatment unit, a returning unit, a reversing unit, a high-frequency identifier, a high-frequency identifying reader, etc. The high-frequency identifying reader reads the high-frequency identifier attached to a target to be treated, and determines whether the target needs a reversal or not, so that in case that a reversal is needed, the top and bottom surface of a target, which is a target for a treatment, in the treatment unit is reversed by the reversing unit. Furthermore, the targets to be treated are loaded on a process tray made of a heat resistant material and treated at the treatment unit, so that much more targets can be treated at once.
申请公布号 KR20160006347(A) 申请公布日期 2016.01.19
申请号 KR20140085420 申请日期 2014.07.08
申请人 PSK INC. 发明人 NAM, SEUNG KYUNG;SEO, WON BUM;KIM, YONG SIK;PARK, BUM JOON
分类号 H01L21/677 主分类号 H01L21/677
代理机构 代理人
主权项
地址
您可能感兴趣的专利