Method for blackening white fluoride spray coating, and fluoride spray coating covered member having a blackened layer on its surface

摘要

This invention is to provide a fluoride spray coating covered member having excellent resistance to halogen corrosion and resistance to plasma erosion and displaying identification symbols such as letters, numeric characters, graphic, pattern, firm name, serial number and so on. In the invention, one or more implanting gases selected from fluorine-containing gas, oxygen gas and inert gas are ion-implanted onto a white fluoride spray coating formed on a surface of a substrate, whereby at least a part of the surface of the white fluoride spray coating is changed into a black color to form a black ion-implanted layer.

主权项

1. A method for blackening a white fluoride spray coating, characterized in that at least a part of a surface of a white fluoride spray coating formed on a surface of a substrate is changed into a black color by implanting ions of one or more implanting gases selected from F-containing gas, an oxygen gas and an inert gas into the white fluoride spray coating to form a black ion implanted layer.