| 摘要 |
PROBLEM TO BE SOLVED: To provide a NOx sensor which can be easily manufactured and can sufficiently suppress reduction of activity of a sensor electrode to NOx.SOLUTION: The NOx sensor includes a measured gas chamber 10, a reference gas chamber 11, a solid electrolyte member 2, and a plurality of electrodes 3 including a reference electrode 3b, a pump electrode 3p, and a sensor electrode 3s, the pump electrode 3p and the sensor electrode 3s being formed on a main surface 21 of the solid electrolyte member 2 near the measured gas chamber 10, the pump electrode 3p including an alloy of Pt and Au, and the sensor electrode 3s including an alloy of Pt and Rh or Pt alone. Further, the NOx sensor includes an Au adsorption layer 5 adsorbing Au atoms evaporated from the pump electrode 3p in the positions of the inside of the measured gas chamber 10 where the Au adsorption layer 5 does not cover the plurality of electrodes 3 formed on the main surface 21. |
