| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measuring device that detects each of the different-width shapes and paired flanks of a work with restraint on any deterioration of the resolution power.SOLUTION: A shape measuring device 10 irradiates with light a work 15 of which a rear face 12 is arranged on a virtual XY plane, the center is arranged in the position where the X axis 13 and the Y axis are orthogonal to each other and the widthwise direction is along the X axis 13 and thereby detects the shape of the front face 17 and the shapes of flanks 18 and 19 respectively disposed on the two sides of the work 15. The device is equipped with a plurality of laser displacement sensors 25, 25a and 25b that irradiate with light expanding in the direction of the X axis 13 toward the area on the positive side direction of the X axis 13 of the XY plane in such a direction that the proceeding direction of the center of the light forms an acute angle to the negative side direction of the X axis 13, and a plurality of laser displacement sensors 26, 26a and 26b that irradiate with light expanding in the direction of the X axis 13 toward the area on the negative side direction of the X axis 13 in such a direction that the proceeding direction of the center of the light forms an acute angle to the positive side direction of the X axis 13. |
