TRAY FOR ELECTROSTATIC ATTRACTION AND SUBSTRATE FIXING DEVICE

摘要

PROBLEM TO BE SOLVED: To provide: a tray for electrostatic attraction interposed between an electrostatic chuck and an object to be attracted and capable of attracting the object to be attracted with a sufficient attraction force; and the like.SOLUTION: The present tray for electrostatic attraction includes: a substrate including a mounting surface on which an object to be attracted is mounted and a back surface that is the opposite surface to the mounting surface; an upper layer electrode embedded on the mounting surface side of the substrate; a lower layer electrode embedded closer to the back surface side than the upper layer electrode of the substrate; and a wiring electrically connecting the upper layer electrode with the lower layer electrode. The object to be attracted mounted on the mounting surface is held by an electrostatic potential applied from the rear surface side.