摘要 |
PROBLEM TO BE SOLVED: To provide a method of manufacturing a high frequency circuit, in which variations in the electrical length of a line with reference to the fundamental and harmonic waves can be suppressed even if the dielectric constant of a dielectric is varied.SOLUTION: In a method of manufacturing a high frequency circuit, in which one mask for exposure is selected from a plurality of masks for exposure in accordance with the dielectric constant of a dielectric, a photosensitive resist layer is formed on the surface of the dielectric, the resist layer is exposed using the selected mask for exposure, an opening is formed in the resist layer by developing the exposed resist layer, and a line is formed on the surface of the dielectric exposed from the opening. |