发明名称 PHOTOMASK FOR PRODUCING DISPLAY DEVICE SUBSTRATE, MANUFACTURING METHOD THEREOF AND MANUFACTURING METHOD OF DISPLAY DEVICE SUBSTRATE
摘要 PROBLEM TO BE SOLVED: To provide a photomask used for producing a display device substrate, the photomask having less influences of sublimate from a photosensitive resin composition, and also to provide a manufacturing method of a photomask and a manufacturing method of a display device substrate.SOLUTION: There is provided a photomask with a surface of a plurality of second openings having the refractive index of 1.4-1.8, so as to form structures having different heights from each other on a display device substrate at stable characteristics (height and size) regardless of a production amount. Thereby, a manufacturing method of a display device substrate can be provided capable of stably producing structures having different heights such as a spacer, regardless of a production amount.
申请公布号 JP2016009055(A) 申请公布日期 2016.01.18
申请号 JP20140129042 申请日期 2014.06.24
申请人 TOPPAN PRINTING CO LTD 发明人 KADOTA SOHEI;SHIBATA KOHEI;SAITO TAKUMI;FUKUYOSHI KENZO
分类号 G03F1/00;G02B5/20;G02F1/1339 主分类号 G03F1/00
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