| 摘要 |
PROBLEM TO BE SOLVED: To provide a method and apparatus capable of performing a fast pouring of gas into a vacuum chamber without being hindered by a rotor of a vacuum pump connected to the vacuum chamber still being rotated even though already been shut off that can be attained as easily as possible even under a relative large volume of the vacuum chamber.SOLUTION: This invention relates to a method for feeding air into a vacuum chamber 14 connected to a vacuum pump 12, in particular, a turbo molecular pump in which gas is also fed to the vacuum pump (12) including one rotor and one stator in simultaneous with feeding of gas into the vacuum chamber 14, the gas feeding operation is carried out just after each of the pump rotors is shut off and a rate of feeding gas is increased during each of the gas feeding processes just after the pressure at the vacuum pump 12 reaches a pre-settable limit value. |
