MEASURING DEVICE, LITHOGRAPHY DEVICE, AND MANUFACTURING METHOD FOR GOODS

摘要

PROBLEM TO BE SOLVED: To provide a technique advantageous in respect of the accuracy of measuring the positions of a mark.SOLUTION: A measuring device that has a movable stage 5 and measures the positions of a mark 8 on the stage is equipped with: an image pickup unit 6 having a plurality of pixels arrayed at a pitch and picking up an image of the mark via the plurality of pixels; a drive unit that alters the positions of the stage 5 and the image pickup unit 6 relative to each other; a measuring unit 9 for measuring the relative positions; and a processor 23 for obtaining the positions of the mark 8 on the basis of a plurality of images obtained by the image pickup unit 6 in a plurality of relative positions between the stage 5 and the image pickup unit 6, the positions differing from one another and pertaining to the pitch. The processor 23 determines, on the basis of deflection in one of the plurality of relative positions, a target relative position for other relative positions of the plurality of relative positions.