| 摘要 |
PROBLEM TO BE SOLVED: To provide a shape measurement device that allows a simple configuration to expand a depth of field while maintaining high resolution.SOLUTION: The shape measurement device comprises: an illumination optical system 30 that includes an illumination system stop 31 that is capable of adjusting the amount of light to be illuminated from a light source 5, and is telecentric on a side of a measured work W; an image formation optical system 40 that makes the measured work W and a light reception surface receiving an image having the measured work projected optically conjugate relationship with each other, includes an image formation system stop 41 conjugate relationship with the illumination system stop 31, and is telecentric on the side of the measured work; and a measurement control unit that controls at least any one of the illumination system stop 31 and the image formation system stop 41, and thereby adjusts a coherence factor serving as a ratio of a numerical aperture of the illumination system stop 31 and a numerical aperture of the image formation system stop 41. |
