发明名称 SHAPE MEASURING DEVICE, STRUCTURE MANUFACTURING SYSTEM, SHAPE MEASURING METHOD, AND STRUCTURE MANUFACTURING METHOD
摘要 PROBLEM TO BE SOLVED: To provide a shape measuring device that can give a highly accurate three-dimensional shape even when blurring occurs.SOLUTION: A shape measuring device comprises a pattern projecting unit 10 that projects a plurality of different patterns onto a measurement object 2; an indicator projecting unit 51 that projects indicators different from the patterns; an indicator stabilizing unit 50 that keeps the attitude of the indicator projecting unit irrespective of the attitude of the pattern projecting unit 10; an image pickup unit 60 that picks up each of images of the measurement object 2 onto which the plurality of patterns are projected; and a blur detecting unit 75 that detects blurring of the patterns that are projected on the basis of the picked-up images.
申请公布号 JP2016008838(A) 申请公布日期 2016.01.18
申请号 JP20140128145 申请日期 2014.06.23
申请人 NIKON CORP 发明人 AOKI HIROSHI
分类号 G01B11/25 主分类号 G01B11/25
代理机构 代理人
主权项
地址