| 摘要 |
PROBLEM TO BE SOLVED: To provide a dicing device and a dicing method capable of performing kerf checking of a groove processed to all processing lines in real time with accuracy without reducing throughput.SOLUTION: A dicing device comprises: a work table 12 for holding a work-piece W; a blade 14 for processing the work-piece W; a table moving mechanism 22 for relatively moving the work table 12 to the blade 14; a microscope 18 arranged at a downstream side in a work-piece movement direction, of the blade 14, and provided for observing a surface of the work-piece W in a state where liquid is interposed between the surface of the work-piece W and itself. This microscope 18 has a line camera in which a plurality of light receiving elements are arranged in a line in a direction vertical to the work-piece movement direction, and consecutively captures an optical image of the surface of the work-piece W in the work-piece movement direction. |
