发明名称 BASE MATERIAL FOR IMPRINT MOLD AND IMPRINT MOLD
摘要 PROBLEM TO BE SOLVED: To provide a base material for an imprint mold capable of preventing a magnification ratio of a fine projecting and recessing pattern from exceeding a desired range, and an imprint mold obtained by using the base material for an imprint mold.SOLUTION: A base material 1 for an imprint mold includes a base 2 having a first surface 2a and a second surface 2b facing the first surface 2a. A concavity 4 is formed at approximately the center on the second surface 2b side as plan view, and a recessed portion having a projecting and recessing volume of a reference volume or more is not present within a region around the concavity 4 on the second surface 2b side.
申请公布号 JP2016009750(A) 申请公布日期 2016.01.18
申请号 JP20140129148 申请日期 2014.06.24
申请人 DAINIPPON PRINTING CO LTD 发明人 YOSHIDA KOJI
分类号 H01L21/027;B29C59/02 主分类号 H01L21/027
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