| 摘要 |
PROBLEM TO BE SOLVED: To illuminate a suction member uniformly, and to fix an object stably over a long term by preventing deflection of the suction member, in a surface emitting chuck table including the porous suction member, an air passage and a lighting apparatus.SOLUTION: A surface emitting chuck table 1 has a suction member 4 composed of a porous material and sucking an object W at a surface, a planar light-emitting device 2 supplying planar light to the back of the suction member 4, and an air passage member 3 arranged between the suction member 4 and planar light-emitting device 2. The air passage member 3 is formed of a translucent material, one surface of the air passage member 3 is in contact with the back of the suction member 4, and air suction grooves 21a, 21b, 21c, 22a are formed in one surface of the air passage member 3. |
