| 摘要 |
PROBLEM TO BE SOLVED: To supply ring frames to a ring frame housing part without temporary stopping the tape sticking device.SOLUTION: A tape sticking device 1 comprises: a holding table 10 for holding a wafer; a ring frame holding table 12 for holding ring frames 3 in ring shapes; at least two ring frame housing parts; ring frame transfer means 15 which transfers the ring frames 3 to the ring frame holding table 12; and a tape sticking mechanism 2. The two ring frame housing parts comprise a first ring frame housing part 13 and a second ring frame housing part 14 next to each other, the second ring frame housing part 14 comprising first moving means 18 for moving the ring frames 3 to a delivery position 4 close to the first ring frame housing part 13 and to a supply position 5 where the ring frames 3 can be supplied. From above, the ring frame housing part can be arranged at a low position, and the ring frames 3 can be continuously supplied to the ring frame holding table 12 without temporary stopping the device. |
