发明名称 IMAGING DEVICE, INSPECTING DEVICE AND INSPECTING METHOD
摘要 PROBLEM TO BE SOLVED: To provide an imaging device, an inspecting device and an inspecting method that can properly estimate a lens.SOLUTION: An imaging device has a board 11 having plural light receiving units 11a for performing photoelectric conversion, an anti-reflection film 12 provided on the board 11, a light shielding pattern 13 which is provided on the anti-reflection film 12 and provided between adjacent pixels, a flatness film 16 provided to cover the anti-reflection film 12 and the light shielding pattern 13, and a lens 17 provided on the flatness film 16. Monitor areas 33 are provided at the outside of a pixel area 21 in which plural pixels 20 are provided, and the anti-reflection film 12, the light shielding pattern 13, the flatness film 16 and the lens 17 are provided to the pixel in the monitor region 33. A light shielding pattern 13a having a different shape from the light shielding pattern 13 within the pixel 20 of the pixel region 31 is partially provided in the pixel of the monitor region 33.
申请公布号 JP2016009826(A) 申请公布日期 2016.01.18
申请号 JP20140131253 申请日期 2014.06.26
申请人 LASERTEC CORP 发明人 ISHIKAWA TAKUJI
分类号 H01L27/14;G02B3/00;H04N5/369 主分类号 H01L27/14
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