| 摘要 |
PROBLEM TO BE SOLVED: To provide a thin film capacitor which has high electrostatic capacity and enables downsizing.SOLUTION: A thin film capacitor 100 according to an embodiment of the invention includes: a substrate 110 having an upper surface including trenches 10; a capacitance part 120 formed by a lower electrode film 121, a dielectric film 122, and an upper electrode film 123 which are laminated from the side of an upper surface of the substrate 110 in a written order so as to correspond to an upper surface shape of the substrate 110. The trenches 10 are respectively formed along peripheries of specific plane figures having internal areas. |
