发明名称 DISPENSER-LIQUID SUPPLY DEVICE OF HIGH-PRECISION DISPENSER
摘要 The present invention relates to a dispenser liquid supply device of a high-precision dispenser which supplies a dispenser liquid supplied at the time of an injection operation of a dispenser at a certain pressure while maintaining the state of uniformly mixed particles to improve dispensing quality. The dispenser liquid supply device comprises: a drive unit which is configured to have a tappet vibrating as linked with an internal drive device protrude downward by a certain length; a coupling unit which is mounted on the bottom face of the drive unit, and injects an introduced dispenser liquid to the outside by the operation of the tappet; a transfer unit which is coupled to one side of the coupling unit, and transfers the dispenser liquid introduced from a syringe into the coupling unit at a certain pressure with the rotation of a screw; a screw unit which is inserted and mounted in the transfer unit and the coupling unit, and is driven to rotate; a fixing unit which fixes the transfer unit to the coupling unit, and couples and fixes the screw unit to a motor drive unit; the motor drive unit which is fixed to the fixing unit, and is connected to the screw unit to rotate the screw unit at a certain speed; and the syringe which is coupled and fixed to one side of the transfer unit, and injects the dispenser liquid into the transfer unit at a certain pressure.
申请公布号 KR101586017(B1) 申请公布日期 2016.01.15
申请号 KR20140154340 申请日期 2014.11.07
申请人 LEE, GU HWAN 发明人 LEE, GU HWAN
分类号 H01L21/58 主分类号 H01L21/58
代理机构 代理人
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