Peili Fabry-Perot-interferometriä varten ja menetelmä sen valmistamiseksi

摘要

A method for producing a mirror plate (100) for a Fabry-Perot interferometer (700) may comprise:
- providing a base slab (51), which comprises a substrate (50) coated with a reflective multilayer coating (60),
- forming one or more intermediate layers (62) on the base slab (51) such that the lowermost intermediate layer (62) substantially consists of silica (SiO2), and such that the multilayer coating (60) is at least partially covered by the lowermost intermediate layer (62),
- forming one or more capacitive sensor electrodes (90a, 90b) by depositing conductive material on top of the intermediate layers (62), and
- removing material of the lowermost intermediate layer (62) by etching (ETCH1) in order to form an exposed aperture portion (AP1) of the multilayer coating (60).