发明名称 THROUGH-TYPE FURNACE FOR SUBSTRATES AND DIE BONDER
摘要 A through-type furnace for substrates comprises a furnace with a channel and a transport system for the transport of the substrates through the channel. The channel is bounded by a base, a front side wall, a rear side wall and a top part. The base contains a plurality of first holes which are connectable to a protective gas source so that protective gas can be supplied during operation. The front side wall of the channel comprises a longitudinal slit which extends parallel to the passage direction and which is bounded by a bottom edge and an upper edge. The transport system comprises at least one clamp for transporting the substrates through the channel. The clamp is movable back and forth along the longitudinal slit of the channel. Such a through-type furnace is in particular suitable for use in a soft solder die bonder.
申请公布号 HK1206866(A1) 申请公布日期 2016.01.15
申请号 HK20150107361 申请日期 2015.07.31
申请人 BESI SWITZERLAND AG 发明人 GUIDO SUTER;KEVIN DOMANCICH;DANIEL ANDREAS SCHERER;RETO WEIBEL
分类号 H01L 主分类号 H01L
代理机构 代理人
主权项
地址