| 摘要 |
The present invention relates to an active vibration control apparatus and, more specifically, to an active vibration control apparatus which stabilizes an upper stage within a desired time by controlling vibration coming up from a base plate. The active vibration control apparatus (1000) according to the present invention comprises: a base plate (1100); a vibration control table (1300) which is installed on the top of the base plate to be vertically guided through a stopper guide (1200) and allows a product to be placed thereon; horizontal X-axis, horizontal Y-axis, and vertical axis vibration control actuators (1400) of which one front end is supported to the base plate and the other front end is supported to the bottom surface of the vibration control table; horizontal X-axis, horizontal Y-axis, and vertical axis sensors (1500) which sense the vibration of each vibration control actuator; multiple level detection sensors which detect the level of each corner part of the vibration control table; a control part (1700) which outputs a level control signal; and a horizontal level control part (1800) which maintains the horizontal level of the vibration control table. |
