发明名称 |
Gyroskooppirakenne ja gyroskooppi parannetulla kvadratuurikompensaatiolla |
摘要 |
A microelectromechanical gyroscope structure that comprises a seismic mass, a body element, and a spring structure suspending the seismic mass to the body element. In primary oscillation at least part of the seismic mass oscillates in out-of-plane direction. A first conductor is arranged to move with the seismic mass, and a second conductor is attached to the body element. The conductors include adjacent surfaces that extend in the first direction and the third direction. A voltage element is arranged to create between the first surface and the second surface a potential difference and thereby induce an electrostatic force in the second direction and modulated by the primary oscillation of the seismic mass. |
申请公布号 |
FI125696(B) |
申请公布日期 |
2016.01.15 |
申请号 |
FI20130005916 |
申请日期 |
2013.09.11 |
申请人 |
MURATA MANUFACTURING CO., LTD. |
发明人 |
RINKIÖ, MARCUS;BLOMQVIST, ANSSI;RUOHIO, JAAKKO |
分类号 |
G01C19/5733;G01C19/5621;G01C19/5656;G01C19/5712;G01P15/125 |
主分类号 |
G01C19/5733 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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